Single layer antireflection coating on PET substrates for display applications

  • Gowtham, M. (Information and communication devices lab, School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Mangalaraj, D. (Information and communication devices lab, School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Seo, Chang-Ki (Information and communication devices lab, School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Shim, Myung-Suk (Information and communication devices lab, School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Hwang, Sun-Woo (Information and communication devices lab, School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Yi, Jun-Sin (Information and communication devices lab, School of Information and Communication Engineering, Sungkyunkwan University)
  • 발행 : 2004.08.23

초록

In the present investigation, we tried AR coating simulation by using the "Essential Macleod optical coating design and analysis" program. After various run of the program we selected appropriate materials which have specific refractive indices and for that thickness was optimized to get the low reflectance. By comparing the simulated results for the different materials,we found that $SiO_2$ and TiN are the appropriate materials for this Flat panel device (FPD) application. Thin films of these materials were deposited using RF magnetron sputtering and Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD) methods on Polyethyleneterephthalate (PET) substrates. Spectroscopic ellipsometer (SE MF-1000) and UV-Vis spectrophotometer (SCINCO) were used for the optical characterization. The obtained experimental results are in good agreement with the simulation results.

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