한국윤활학회:학술대회논문집 (Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference)
- 한국윤활학회 2004년도 학술대회지
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- Pages.90-98
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- 2004
Nano/Micro-friction properties or Chemical Vapor Deposited (CVD) Self-assembled monolayers on Si-wafer
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Yoon Eui-Sung
(Tribology Research Center, Korea Institute of science and Technology) ;
- Singh R.Arvind (Tribology Research Center, Korea Institute of science and Technology) ;
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Han Hung-Gu
(Tribology Research Center, Korea Institute of science and Technology) ;
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Kong Hosung
(Tribology Research Center, Korea Institute of science and Technology)
- 발행 : 2004.11.01
초록
Nano/micro-scale studies on friction properties were conducted on Si (100) and three self-assembled monolayers (SAMs) (PFOTC, DMDM, DPDM) coated on Si-wafer by chemical vapor deposition technique. Experiments were conducted at ambient temperature