Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07b
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- Pages.865-868
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- 2004
Production Characteristics of Thermoelectric Film Produced by Vacuun Evaporation
진공증착에 의해 제조된 열전 박막의 제조 특성
-
Kim, Bong-Seo
(KERI) ;
- Jeong, Hyun-Uk (KERI) ;
-
Park, Su-Dong
(KERI) ;
-
Lee, Hee-Woong
(KERI)
- Published : 2004.07.05
Abstract
열 진공 증착법(thermal vacuum evaporation)에 의해 p-형 열전박막을