한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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- Pages.195-198
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- 2004
초음파분무법으로 제조한 ZnO막의 PL특성
PL Properties of ZnO Films Prepared by Ultrasonic Spray Pyrolysis
- Choi, Mu-Hee (Division of Electrical & Electronic Engineering, Gyeongsang National University) ;
- Chun, Young-Duk (Division of Electrical & Electronic Engineering, Gyeongsang National University) ;
- Ma, Tae-Young (Division of Electrical & Electronic Engineering, Gyeongsang National University)
- 발행 : 2004.11.11
초록
ZnO films were Prepared by ultrasonic spray Pyrolysis on MgO substrates. The surface morphology and crystallinity were observed as a function of substrate temperature by SEM and XRD, respectively. PL properties of the ZnO films were studied by using Cd-He laser. UV light around 3.37 eV was pronounced in the PL spectra. The origin of the PL peak was discussed.