한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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- Pages.377-380
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- 2004
칼코게나이드 3원계 박막에서의 전기적 특성에 관한 연구
Electrical characteristic of differential ternary chalcogenide thin films
- Yang, Sung-Jun (Department of Electronic Materials Engineering, Kwangwoon University) ;
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Shin, Kyung
(Department of Electronic Materials Engineering, Kwangwoon University) ;
- Lee, Jae-Min (Department of Electronic Materials Engineering, Kwangwoon University) ;
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Chung, Hong-Bay
(Department of Electronic Materials Engineering, Kwangwoon University)
- 발행 : 2004.07.05
초록
The phase transition between amorphous and crystalline states in chalcogenide semiconductor films can controlled by electric pulses or pulsed laser beam; hence some chalcogenide semiconductor films can be applied to electrically write/erase nonvolatile memory devices, where the low conductive amorphous state and the high conductive crystalline state are assigned to binary states. GeSbTe(GST), AsSbTe(AST), SeSbTe(SST) used to phase change materials by appling electrical pulses. Thickness of ternary chalcogenide thin films have about 100nm. Upper and lower electrode were made of Al. It is compared with I-V characteristics after impress the variable pulses.