Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2004.05a
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- Pages.63-63
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- 2004
Properties of high-k $HfO_2$ films grown by MOMBE
MOMBE로 성장한 고유전 $HfO_2$ 박막의 전기적 특성
- Published : 2004.05.14
Abstract
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