FPD Exposure System 용 투영광학계 설계

Design of Projection Optics System for FPD Exposure

Exposure System is used for printing a prescribed pattern on a printed board, a liquid crystal substrate or the like. In this paper we are trying to develop projection Optics Exposure System for manufacturing Color Filter of LCD Display. This paper explain the Projection Optics Design and Illumination Optics Design of Color Filter Exposure system.