The Development of adaptive optical dimension measuring system

적응형 광학 치수 측정 장치 개발

A new dimension measuring method for the measurement of diameter of an object has been developed using laser triangulation. The 3-D data of an object was calculated from the 2dimensional image information obtained by the laser stripe using the laser triangulation. The system can measure the diameter of hole not only in a normal plane but also in an incline plane. We can experiment with magnification that is optimized according to size of object using zoom lens. In this paper, the theoretical formula and calibration of the system were described. The measuring precision of the system was investigated by experiment.