Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2004.10a
- /
- Pages.672-676
- /
- 2004
- /
- 2005-8446(pISSN)
Measurement of 5 DOF Motion Errors in the Ultra Precision Feed Tables for Error Compensation
오차보정을 위한 초정밀 테이블의 5 자유도 운동오차 측정
Abstract
In this paper, measuring system of 5 DOF motion errors are proposed using two capacitive type sensor, a straight edge and a laser interfoerometer. Yawing error and pitching error are measured using the laser interferometer, and rolling error is measured by the reversal method using a capacitive type sensor. Linear motion errors of horizontal and vertical direction are measured using the sequential two point method. In this case, influence of angular motion errors is compensated using the previously measured angular motion errors. In the horizontal direction, measuring accuracy is within 0.05
Keywords