Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2004.10a
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- Pages.250-253
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- 2004
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- 2005-8446(pISSN)
Microvalve with multilayer Bender Type PZT Actuator
적층 벤더형 압전 액추에이터 마이크로 밸브
Abstract
This study deals with the microvalve, which is composed of the multilayer bender type PZT actuator, actuator controller and microvalve body. The object of this study is to develope the microvalve with multilayer bender type PZT actuator. In order to achieve this object, prototype PZT actuator and microvalve were suggested and manufactured. Also, the performance of this model was evaluated through the experiments.
Keywords