한국소음진동공학회:학술대회논문집 (Proceedings of the Korean Society for Noise and Vibration Engineering Conference)
- 한국소음진동공학회 2004년도 춘계학술대회논문집
- /
- Pages.888-893
- /
- 2004
- /
- 1598-2548(pISSN)
Bimorph PZT를 이용한 고밀도 광학헤드의 정밀위치 및 간극제어
Precision Position and Gap Control for High Density Optical Head Using Bimorph PZT
초록
This paper proposed a dual actuator using bimorph PZT for information storage device based on prove array NSOM(Near-field Scanning Optical Microscopy). The gap between the media and the optical head should be maintained within the optical tolerance. Therefore, a new actuator having high sensitivity is required. Bimorph PZT, which has fast access time and high sensitivity characteristic, is suitable for this precise actuating system. This paper is focused on derivation of mathematical model of dual bimorph PZT actuator and control algorithm. Hamilton's principle was used for mathematical model. The model is verified by FEA(Finite Element Analysis), and compared with experimental results. Different control algorithms were used f3r two bimorph PZT actuating same direction and opposite direction. The gap between recording media and optical head was controlled within 20nm in experiment.