한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)

한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

리니어모터를 이용한 고속 저중심 스테이지의 개발과 정밀도 향상

Development for Scanning Type Stage Driven by Linear Motors

  • 송창규 (한국기계연구원 공작기계그룹) ;
  • 김정식 (충남대 대학원 기계공학) ;
  • 김경호 (한국과학기술원 기계공학) ;
  • 박천홍 (한국기계연구원 공작기계그룹)
  • 발행 : 2004.04.01
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초록

Linear motor is very rapidly substituted for rotary motor and ball screw for precision positioning applications because of its characteristics such as high speed, no backlash and simplicities. A precision positioning system which is composed of linear motion(LM) guide and linear motor is widely used since it has easy controllable property but this system has low accuracy problem caused by friction of the LM guide. In this study, a scanning type XY stage is manufactured and some experiments is performed to improve the accuracy of the stage.

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