한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2003년도 제24회 학술발표회 초록집
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- Pages.214-214
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- 2003
Ambipolar EXB drift in Transversely Magnetized Capacitive Coupled Plasma
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Yu, Sin-Jae
(Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Jo, Yong-Seok (Department of Physics, Korea Advanced Institute of Science and Technology) ;
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Jang, Hong-Yeong
(Department of Physics, Korea Advanced Institute of Science and Technology) ;
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Jang, Chung-Seok
(Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Jeong, Jin-Uk (Division of Electrical and Computer Engineering, Hanyang Univ.)
- 발행 : 2003.02.14