Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.02a
- /
- Pages.199-199
- /
- 2003
Investigation of HfO$_{2}-Al_{2}O_{3}$ laminate and Hf-Al-O films with poly-Si Gates.
- Hua, J. (Department of Physics, Chungbuk National University) ;
- Lee, S.W. (Department of Physics, Chungbuk National University) ;
-
Kang, H.J.
(Department of Physics, Chungbuk National University)
;
- Lee, Y.S. (Div. of Information Communication & Computer Eng.) ;
- Lim, K.Y. (Hynix Semiconductor Inc.) ;
- Cho, H.J. (Hynix Semiconductor Inc.) ;
- Lee, N.K. (Genus Korea Co. Ltd.)
- Published : 2003.02.14
Abstract
Keywords