A New process for the Solid Phase Crystallization of a-Si by the thin film heaters

  • Jung, In-Young (School of Materials Science and engineering, Seoul National University) ;
  • Kim, Byoung-Dong (School of Materials Science and engineering, Seoul National University) ;
  • Song, Nam-Kyu (School of Materials Science and engineering, Seoul National University) ;
  • Joo, Seung-Ki (School of Materials Science and engineering, Seoul National University)
  • Published : 2003.02.14