Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2003.04a
- /
- Pages.945-949
- /
- 2003
Fabrication of Ni master for the replication of planar optical devices by LIGA process
LIGA 공정을 이용한 평면형 광소자용 Ni 마스터 제작
- Published : 2003.04.23
Abstract
LIGA(Lithographie Galvanoformung Abformung), a fabrication method for the production of microstructrues with a high aspect ratio, is now playing an important role in a fabrication of polymeric optical waveguide device as the replication processes have been developed such as hot embossing and injection molding. The present report deals with the fabrication of Ni master used for the replication of multi-mode polymeric optical waveguide. With the basic technological features in the sequence of the LIGA technique, we fabricated Ni master with 12 channel microstructures of