대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2003년도 추계학술대회
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- Pages.1927-1931
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- 2003
미세접촉인쇄기법의 설계와 다중스케일해석
Design and Multi-scale Analysis of Micro Contact Printing
- 발행 : 2003.11.05
초록
Nanometer-sized structures are being applied to many fields including micro/nano electronics, optoelectronics, quantum computing, biosensors, etc. Micro contact printing is one of the most promising methods for manufacturing the nanometer-sized structures. The crucial element for the micro contact printing is the nano-resolution printing technique using polymeric stamps. In this study, a multi-scale analysis scheme for simulating the micro contact printing process is proposed and some useful analysis results are presented. Using the slip-link model [1], the dependency of viscoelasticity on molecular weight of polymer stamp is predicted. Deformation behaviors of polymeric stamps are analyzed using finite element method based upon the predicted viscoelastic properties.
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