대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2003년도 추계학술대회
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- Pages.1921-1926
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- 2003
나노인덴테이션을 이용한 나노 임프린트된 폴리머 박막의 잔류두께 측정기법
A measurement technique for residual thickness of nano-imprinted polymer film using nano-indentation.
초록
Nano-imprint technology has been vigorously studied by many researchers for it is one of the most promising technologies for manufacturing the pattern with its critical dimension below 100nm. In the nano-imprint technology, nano patterns are transferred on a polymer film and the transferred patterns are used as an etch mask to define the designed patterns on a substrate or a metal layer. To this end, it is important to keep the residual thickness of the imprinted polymer film uniform. In this study, a novel measurement technique to measure the residual thickness of films is proposed based on nanoindentation theory. This technique has advantages of saving time and measuring the residual thickness of highly-localized portions in comparison with other techniques, but has limitation of requiring calibration process.
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