A Precision Micro-Positioning System by Using Hinge Mechanism

  • Choi, Hyeun-Seok (Department of Mechanical Engineering, Hanyang University) ;
  • Lee, Hak-Joon (Department of Mechanical Engineering, Hanyang University) ;
  • Han, Chang-Soo (Department of Mechanical Engineering, Hanyang University) ;
  • Kim, Seung-Soo (Production Technology Center Micro Forming Tech Team, KITECH) ;
  • Kim, Eung-Zu (Production Technology Center Micro Forming Tech Team, KITECH) ;
  • Choi, Tae-Hoon (Production Technology Center Micro Forming Tech Team, KITECH) ;
  • Na, Kyoung-Hwan (Production Technology Center Micro Forming Tech Team, KITECH)
  • 발행 : 2003.10.22

초록

A precision micro-positioning system with a high displacement resolution and wide motion range has been required for industrialized applications in variety fields. This paper discusses the design of a precision micro-rotation stage with flexure hinges. Proposed system is applied to grinding machine for micro parts. Rotational motion is generated with this system. For this systems having a full rotation motion with high precision, a dual servo system with a coarse stage and a fine stage is proposed.

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