A modeling of the magnetic levitation stage and its control

In this paper, we address the development of magnetic levitation positioning system. This planar magnetic levitator employs four permanent magnet liner motors. Each motor generates vertical force for suspension against gravity, as well as horizontal force for drive levitation object called a platen This stage can generate six degrees of freedom motion by the vertical and horizontal force. We derived the mechanical dynamics equation using lagrangian method and used coenergy to express an electromagnetic force. We proposed control algorithm for the position and posture control from its initial value to its desired value using sliding mode control. Some simulation result is provided to verify the effectiveness of the proposed control scheme.