한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

바이어스 조건하에서 증착한 a-C:H 박막을 이용한 액정 배향 효과

LC Alignment Effects using a-C:H Thin Film as Working Gas at Bias Condition

  • 조용민 (연세대학교 전기전자공학과) ;
  • 황정연 (연세대학교 전기전자공학과) ;
  • 박창준 (연세대학교 전기전자공학과) ;
  • 서대식 (연세대학교 전기전자공학과) ;
  • 노순준 (연세대학교 금속시스템공학과) ;
  • 안한진 (연세대학교 금속시스템공학과) ;
  • 백홍구 (연세대학교 금속시스템공학과)
  • 발행 : 2003.04.19
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초록

We studied the nematic liquid crystal (NLC) aligning capabilities using the new alignment material of a-C:H thin film as working gas at 30W rf bias condition. A high pretilt angle of about $5^{\circ}$ by ion beam(IB) exposure on the a-C:H thin film surface was measured. A good LC alignment by the IB alignment method on the a-C:H thin film surface was observed at annealing temperature of $250^{\circ}C$, and the alignment defect of the NLC was observed above annealing temperature of $300^{\circ}C$. Consequently, the high LC pretilt angle and the good thermal stability of LC alignment by the IB alignment method on the a-C:H thin film surface as working gas at 30W rf bias condition can be achieved.

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