한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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- Pages.141-144
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- 2003
RF 마그네트론 스퍼터링법으로 증착된 ZnO 박막 SAW 필터의 제작
Fabrication of a SAW Filter Using a ZnO Thin Film deposited by RF Magnetron Sputtering
- Jung, Eun-Ja (Kyungpook National Uni.) ;
- Jang, Cheol-Yeong (Kyungpook National Uni.) ;
- Jung, Young-Chul (Gyeongju Uni.) ;
- Choi, Hyun-Chul (Kyungpook National Uni.) ;
- Lee, Yong-Hyun (Kyungpook National Uni.)
- 발행 : 2003.05.16
초록
This study proposes ZnO thin film as a piezoelectric material for SAW (surface acoustic wave) filter. The ZnO thin film with thickness