한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
- /
- Pages.137-140
- /
- 2003
C-V Technique을 이용한 low-k polyimide로의 구리의 drift diffusion 연구
Use of a capacitance voltage technique to study copper drift diffusion in low-k polyimide
- Choi, Yong-Ho (Myongji Uni) ;
- Lee, Heon-Yong (Myongji Uni) ;
- Kim, Jee-Gyun (Myongji Uni) ;
- Kim, Jung-Woo (Myongji Uni) ;
- Kim, Yoo-Kyuong (Myongji Uni) ;
- Park, Jin-Ho (Uiduk Uni.)
- 발행 : 2003.05.16
초록
Cu+ ions drift diffusion in different dielectric materials is evaluated. The diffusion is investigated by measuring shift in the flatband voltage of capacitance/voltage measurements on Cu gate capacitors after bias temperature stressing. At a field of 1.lMV/cm and temperature