Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.05d
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- Pages.100-104
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- 2003
Development of Thermal Sensor Devices in the $BaTiO_3$ Systems
$BaTiO_3$ 계 박막형 열전센서소자 개발
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Song, Min-Jong
(Department of Medical Information Engineering, Kwang-Ju Health College)
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송민종
(광주보건대학 의료정보공학과)
- Published : 2003.05.30
Abstract
Keywords
- rf/dc magnetron sputter;
- X-ray diffraction patterns;
- $BaTiO_3$ ceramic thin films;
- PTCR(positive-temperature coefficient of resistance);
- poly-crystallization