한국정보디스플레이학회:학술대회논문집
- 2003.07a
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- Pages.56-57
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- 2003
Sequential Lateral Solidification for Present and Future Applications
- Wilt, Paul C. van der (Program in Material Science and Engineering, School of Engineering and Applied Sience, Columbia University) ;
- Turk, Brandon A. (Program in Material Science and Engineering, School of Engineering and Applied Sience, Columbia University) ;
- Limanov, Alex B. (Program in Material Science and Engineering, School of Engineering and Applied Sience, Columbia University) ;
- Chitu, Adrian C. (Program in Material Science and Engineering, School of Engineering and Applied Sience, Columbia University) ;
- Im, James S. (Program in Material Science and Engineering, School of Engineering and Applied Sience, Columbia University)
- Published : 2003.07.09
Abstract
Sequential lateral solidification has recently become an option for manufacturing LTPS TFT LCDs owing to the availability of production equipment. Compared to the currently established ELA crystallization method, it is characterized by its low running costs and the high quality microstructures that can be obtained. In this presentation, we will review the production-related developments as well as elaborate on recent research activities that deal with a number of crystallization schemes that can be beneficial for future active-matrix display products.
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