Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)
- 2003.11a
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- Pages.78-84
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- 2003
Tribological properties of sputtered boron carbide coating and the effect of $CH_4$ reactive component of processing gas
- Cuong Pham Duc (Tribology Research Center, Korea institute of science and Technology) ;
- Ahn Hyo-Sok (Tribology Research Center, Korea institute of science and Technology) ;
- Kim Jong-Hee (Information System Technology R&D Center, SEMTech Corporated) ;
- Shin Kyung-Ho (Nano Device Research Center, Korea Institute of Science and Technology)
- Published : 2003.11.01
Abstract
Boron carbide thin coatings were deposited on silicon wafers by DC magnetron sputtering using a
Keywords
- Boron carbide coating;
- DC magnetron sputtering;
- processing gas;
- friction and wear;
- X-ray Photoelectron Spectroscopy;
- Auger Electron Spectroscopy