Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)
- 2003.11a
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- Pages.56-63
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- 2003
Micro/nano adhesion and friction properties of mixed self-assembled monolayer
혼합 Self-assembled monolayer의 마이크로/나노 응착 및 마찰 특성
- Oh Hyun-Jin (Tribology Research Center, KIST) ;
- Yoon Eui-Sung (Tribology Research Center, KIST) ;
- Han Hung-Gu (Tribology Research Center, KIST) ;
- Kong Hosung (Tribology Research Center, KIST) ;
- Jhang Kyung Young (School of Mechanical Engineering, Hanyang University)
- 오현진 (한국과학기술연구원 트라이볼로지 연구센터) ;
- 윤의성 (한국과학기술연구원 트라이볼로지 연구센터) ;
- 한흥구 (한국과학기술연구원 트라이볼로지 연구센터) ;
- 공호성 (한국과학기술연구원 트라이볼로지 연구센터) ;
- 장경영 (한양대학교 기계공학부)
- Published : 2003.11.01
Abstract
Micro/nano adhesion and friction properties of mixed self-assembled monolayer (SAM) with different chain length for MEMS application were experimentally studied. Many kinds of SAM having different spacer chains(C6, C10 and C18) and their mixtures (1:1) were deposited onto Si-wafer, where the deposited SAM resulted in the hydrophobic nature. The adhesion and friction properties between tip and SAM surfaces under nano scale applied load were measured using an atomic force microscope (AFM) and micro scale applied load were measured using ball-on-flat type micro-tribotester. Surface roughness and water wetting angles were measured with SPM (scanning probe microscope) and contact anglemeter. Results showed that wetting angles of mixed SAMs showed the similar value of pure SAMs. The coating surface morphology was increased as mixing of SAM. Nano adhesion and nano friction decreased as increasing of the spacer chain length and mixing of SAM. Micro friction was decreased as increasing of the spacer chain, but micro friction of mixed SAM showed the value between pure SAMs. Nano adhesion and friction mechanism of mixed SAM was proposed in a view of stiffness of spacer chain modified chemically and topographically.