한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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- Pages.372-375
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- 2003
MEMS용 MCA/Si diaphragm 구조의 변위해석
Deflection Analysis of MCA/Si diaphragm for MEMS
- Kim, Jae-Min (Dongseo Univ.) ;
- Lee, Jong-Choon (Kyungnam Information College) ;
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Yoon, Suk-Jin
(KIST)
;
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Chung, Gwiy-Sang
(Dongseo Univ.)
- 발행 : 2003.11.13
초록
MCA deflection control is a important technology for the development of MEMS applications. In this study, deflection analysis at the MLA/Si diaphragm was investigated by Finite Element Method. Analysis of Si diaphragm combined with MCA has been implemented into the ANSYS (Solid5 and Solid45). On the basis of this structure, deflection versus MCA number of layers has been modelled and MCA/Si contact area characteristics with different diaphragm conditions were analyzed. Consequently, it is expected that fabrication technology of MCA/Si diaphragm could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.