Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.11a
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- Pages.176-179
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- 2003
Electrical and Optical Properties of ITO Thin Films Prepared on the PET Substrate
PET 기판 위에 증착된 ITO 투명전도막의 전기적.광학적 특성
- Lee, Jae-Hyeong (Kunsan National Uni.) ;
- Jung, Hak-Gi (Kunsan National Uni.) ;
- Lim, Dong-Gu (Chungju National Uni.) ;
- Yang, Kea-Joon (Chungju National Uni.) ;
- Yi, Jun-Sin (Sungkyunkwan Uni.)
- Published : 2003.11.13
Abstract
ITO films on PET substrate were prepared by DC magnetron sputtering method using powdery target with different deposition conditions. In addition, the electrical and optical properties were investigated. As the sputtering power and working pressure were higher, the resistvity of ITO films increased. The optical transmittance deteriorated with increasing sputtering power and thickness. As the working pressure increased, however, the optical transmittance improved at visible region of light. From these results, we could deposited ITO films with