한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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- Pages.200-206
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- 2003
Dynamic Analysis of Sliders in Optical Memory System
초록
Identification method is formulated to evaluate the dynamic characteristics of air bearings under NFR (Near Field Recording) sliders. Using dynamic analysis, impulse responses and frequency response functions of NFR sliders are obtained on numerical non-linear models including rigid motion of slider and fluid motion of air bearing under the slider. System parameters are identified by modal analysis method and instrumental variable method. The identified system parameters of sliders are utilized to evaluate the dynamic characteristics of air bearings.
키워드