한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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- Pages.163-168
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- 2003
SHAPE EFFECT ON PERFORMANCE OF MULTILAYER CERAMIC ACTUATOR
- Wee, S. B. (School of Information Technology, Korea University of Technology and Education) ;
- Jeong, S. J. (Korea Electrotechnology Research Institute) ;
- Song, J. S. (Korea Electrotechnology Research Institute)
- 발행 : 2003.12.01
초록
In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of
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