Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2003.12a
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- Pages.136-140
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- 2003
Characteristics and Fabrication of 2-Dimensional High Speed pH Image LAPSwith the $Si_{3}N_{4}$ and the $Ta_{2}O_{5}$ Sensing Membrane
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