Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2003.12a
- /
- Pages.141-145
- /
- 2003
A New Technique for Ultrasonic Thickness Measurement of Thin Film
- Im, Nohyu-K. (Dept. of Mechatronics Engineering, Korea University of Technology and Education) ;
- Moon, Byung-Jun (Graduate School, Dept. of Mechatronics Engineering, Korea University of Technology and Education)
- Published : 2003.12.01
Abstract
Keywords