한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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- Pages.141-145
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- 2003
A New Technique for Ultrasonic Thickness Measurement of Thin Film
- Im, Nohyu-K. (Dept. of Mechatronics Engineering, Korea University of Technology and Education) ;
- Moon, Byung-Jun (Graduate School, Dept. of Mechatronics Engineering, Korea University of Technology and Education)
- 발행 : 2003.12.01