Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2003.11a
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- Pages.970-976
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- 2003
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- 1598-2548(pISSN)
Dynamics of a Micro Three-Axis Ring Gyroscope Considering Electrode Effects
전극 효과를 고려한 마이크로 3축 링 자이로스코프의 동역학
Abstract
In this paper, we analyse and present electro-mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the notation of the gyroscope main body. The motions of the ring are electro-statically derived, sensed and balanced by electrodes. The equations of motion are formulated. The scheme of angular velocities sensing by force-to-rebalance method is presented. The dynamic characteristics of a ring gyroscope are calculated and compared.
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