Modeling and Motion Control of Piezoelectric Actuator

비선형성을 고려한 압전소자의 모델링 및 운동제어

This paper proposes a new modeling scheme to describe the hysteresis and the dynamic characteristics of piezoelectric actuators in the inchworm and develops a control algorithm for the precision motion control. From the analysis of piezoelectric actuator behaviors, the hysteresis can be described by the functions of a maximum input voltage. The dynamic characteristics are also identified by the frequency domain modeling technique based on the experimental data. For the motion control, the hysteresis behavior is compensated by the inverse hysteresis model. The dynamic stiffness of an inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. Therefore, the sliding mode control and the Kalman filter are developed for the precision motion control of the inch-warm. To demonstrate the effectiveness of the proposed modeling schemes and control algorithm, experiment validations are performed.