Dynamic Characteristics Analysis of the Carriage Structure Supported by Air Bearing

에어베어링으로 지지된 캐리지 구조물의 동특성 해석

In this thesis, the dynamic characteristic analysis of carriage structure supported by air bearings were peformed. Toward this end, the characteristics of air bearing were numerically analyzed to estimate the stiffness of the air bearing and the clearance between air bearing and guide surface. The modal analysis of the carriage structure was peformed by using finite element method, and the experimental modal analysis was also performed to validate the finite element model, where rigid body modes were compared to validate the stiffness of the air bearings. From the results, the air spring stiffness can be estimated within the range of acceptable accuracy under any pressure and clearance condition.