한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2003년도 춘계학술대회 논문집
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- Pages.1224-1226
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- 2003
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- 2005-8446(pISSN)
미세접촉인쇄기법을 이용한 미세패턴 제작
Fabrication of Micropattern by Microcontact Printing
초록
In this work, we developed a high resolution printing technique based on transferring a pattern from a PDMS stamp to a Pd and Au substrate by microcontact printing Also, we fabricated various 2D metallic and polymeric nano patterns with the feature resolution of sub-micrometer scale by using the method of microcontact printing (
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