한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2003년도 춘계학술대회 논문집
- /
- Pages.1117-1122
- /
- 2003
- /
- 2005-8446(pISSN)
하중 게재시 정지상태 및 이송속도에 따른 테이블 처짐에 관한 연구
A Study on the Table Deflection by Stop State and Move Speed at Loaded Load
초록
The paper on table deflection by stop state and move speed at loaded load, and the table deflection measured of static load. It is developed program for Date correction of LSM(Least Square Method). We experimented the method as following. The first a Laser setting and scan Experimental device measured curvature radius, The second A center of measurement object and curvature radius taking of LSC.