마이크로 시스템 구현을 위한 5축 가공기에 관한 연구

A study on 5-axis Milling Machine for Micro System Manufacturing

As the advance in technology requires micro mechanical systems, the production methods for micro parts are of a great interest of many researchers. Although MEMS is one of the most popular methods. it can only produce 2D microstructures. The micro manufacturing with micro-mill and micro-lathe has a great potential for producing arbitrary 3D shapes and are being researched. In this paper, a PC based 5-axis milling machine with high precision was developed. To evaluate the machine performance, micro ribs and micro columns were machined. The machining experiments of micro impeller and micro turbine blade confirmed the possibility of micro system manufacturing by using the developed milling machine.