한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2003년도 춘계학술대회 논문집
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- Pages.276-279
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- 2003
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- 2005-8446(pISSN)
백색광 주사 간섭계에서 편광을 고려한 반사시 위상 변화
Phase change on reflection considered of the polarization in white-light interferometer
초록
The phase change upon reflection from target surfaces in white-light interferometer induces measurement errors when target surfaces are composed of dissimilar materials. We prove that this phase change on reflection considered of the polarization of the white-light causes the shift of both envelope peak position and fringe peak position of several tens of nanometer. In addition, we propose a new equation of white-light interference fringe pertinent to the polarization of source.