A study on Ultra Precision machining process for Aspheric

비구면 초정밀절삭 공정기술에 관한 연구

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a circle leaf spring mechanism and a capacitive-type sensor. The, contact probe is attached on the z-axis during measurement while aspheric object are supported on the diamond turning machine(DTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of on-machine measurement system in this investigation is capable of providing a repeatability of 10 nanometers with a $\pm$20 uncertainty of 200nmPv.