한국정보통신학회:학술대회논문집 (Proceedings of the Korean Institute of Information and Commucation Sciences Conference)
- 한국해양정보통신학회 2003년도 추계종합학술대회
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- Pages.381-384
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- 2003
Cobalt (Co) Electrode FBAR Devices Fabricated on Seven-Layered Bragg Reflectors and Their Resonance Characteristic
- Mai Linh (Information and Communications University (ICU)) ;
- Munhyuk Yim (Information and Communications University (ICU)) ;
- Kim, Dong-Hyun (Information and Communications University (ICU)) ;
- Giwan Yoon (Information and Communications University (ICU))
- 발행 : 2003.10.01
초록
In this paper, cobalt (Co)-electrode FBAR devices fabricated on seven-layered Bragg Reflectors are presented along with their resonance characteristics. ZnO films are used as the resonating material in FBAR devices where the Co electrode is 3000
키워드