Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 2003.07a
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- Pages.98-99
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- 2003
Fabrication of PIN Photodiode for Solid-state Detector
고체형 검출기를 위한 핀 포토다이오드 제작
- Kwak, Sung-Woo (KAIST) ;
- Gyuseong Cho (KAIS) ;
- Hyungjoo Shin (KAIS) ;
- Park, Seung-Nam (KRISS)
- Published : 2003.07.01
Abstract
PIN photodiode has been used in solid-state detector for x-ray detection as a photosensor of visible light from scintillator. Since the light from CWO is short wavelength having peak at 490nm, the light is absorbed within a very shallow layer near the surface of the photodiode before arriving at the depletion layer and does not contribute to the signal. In designing the PIN photodiode, it is important to make the p-layer as shallow as possible. (omitted)
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