Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference (한국초전도저온공학회:학술대회논문집)

The Korean Society of Superconductivity and Cryogenics (한국초전도저온학회)
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SINIS Technology for RSFQ Circuit Fabrication

RSFQ 회로 제작용 SINIS 조셉슨 접합기술

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  • D. Balashov ;
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  • Published : 2003.10.01
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Abstract

The high speed of RSFQ circuits is based on the self-resetting in the overdamped Josephson junctions. The SIS technology using Nb/A1$_2$O$_3$/Nb trilayer has been successfully adopted as a standard technology. However the newly suggested SINIS technology attracts interest because the junction itself is overdamped without any external shunt, and provides possibility of simplification of RSFQ circuit design and fabrication. In this paper we demonstrate RSFQ circuit fabrication process using SINIS technology.

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