Proceedings of the Korean Society for Technology of Plasticity Conference (한국소성가공학회:학술대회논문집)
- 2003.05a
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- Pages.481-484
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- 2003
Fabrication of metallic nano-stamper to replicate nanoscale patterns
나노패턴 성형을 위한 금속 나노 스탬퍼 제작
Abstract
In this study, we fabricated the master metallic nano-stamper with nano pillar patterns to apply replication processes which is adequate for mass production. Master nano patterns with various hole diameters between 300 nm and 1000 nm was fabricated by e-beam lithography. After the seed layer was deposited on the master nano patterns using e-beam evaporation, the nickel was electroformed. In each step, the shape and surface roughness of their patterns were analyzed using SEM and AFM.
Keywords
- E-beam lithography;
- master nano patterns;
- master metallic nano-stamper;
- metallic nano-stamper;
- seed layer;
- electroforming