Proceedings of the Korean Society of Surveying, Geodesy, Photogrammetry, and Cartography Conference (한국측량학회:학술대회논문집)
- 2003.04a
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- Pages.151-159
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- 2003
3D Surface Model Generation of Micro Structure by Self Calibration of The SEM Image
SEM 영상의 자체검정에 의한 미세구조물의 3차원 표면모델 생성
Abstract
This study presents method for self-calibration of the SEM(Scanning Electron Microscope) stereo image using the standard microprobe with same grid pattern and using parallel and central perspective projection equation. Result showed that parallel projection method is more suitable for standard microprobe. The maximum error of 3D coordinates acquired by this method did not exceed 5
Keywords
- SEM;
- stero image;
- parallel and central perspective projection;
- Digital Surface Model;
- Digital Photogrammetry