A novel encoder of digital and analog hybrid typo ofr servo control with high-precision resolution

초정밀 위치제어를 위한 새로운 디지털 아날로그 혼합형 엔코더

  • 박종원 (부경대학교 기계과) ;
  • 홍정표 (부경대학교 기계과) ;
  • 박성준 (동명대학 전기전자자동화정보계열) ;
  • 권순재 (부경대학교 기계과) ;
  • 손무헌 (동명대학 전기전자자동화정보계열) ;
  • 김종달 (동명대학 전기전자자동화정보계열) ;
  • 김규섭 (동명대학 전기전자자동화정보계열)
  • Published : 2003.07.21

Abstract

Position controls are very important in semiconductor manufacturing devices, machine tools precision measuring instruments, etc. to measure the distance of movement of moving objects in minute units and the accuracy of measurement for the moving distance in these devices affect the performance of the whole devices. Therefore, in those precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. In this paper, a novel encoder of digital and analog hybrid type is proposed. It is shown that from this experiment a high-resolution angle measurement device can be designed by a low cost incremental encoder.

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