Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2003.07c
- /
- Pages.1695-1697
- /
- 2003
E-H mode transition of Inductively Coupled Plasma with Ar Gas Pressure and RF Power (13.56MHz)
Ar 가스압력과 RF 전력변화 (13.56MHz)에 따른 유도결합형 플라즈마의 광학적 E-H모드변환 특성
- Her, In-Sung (Wonkwang University) ;
- Lee, Young-Hwan (Wonkwang University) ;
- Choi, Young-Sung (Wonkwang University) ;
- Park, Dae-Hee (Wonkwang University)
- Published : 2003.07.21
Abstract
In this paper the emission properties of electrodeless fluorescent lamp were discussed using the inductively coupled plasma. To transmit the electromagnetic energy into the chamber a RF power of 13.56MHz was appied to the antenna and considering the Ar gas pressure and the RF electric power change, the emission spectrum, Ar-I line, luminance were investigated. At this time the input parameter for ICP RF plasma, Ar gas pressure and RF power were applied in the range of 10
Keywords