한국윤활학회:학술대회논문집 (Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference)
- 한국윤활학회 2002년도 제35회 춘계학술대회
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- Pages.40-44
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- 2002
자기 조립 분자막의 표면파손특성 및 미세 금속 구조물 제작에의 응용
Surface Damage Characteristics of Self-Assembled Monolayer and Its Application in Metal Nano-Structure Fabrication
- Sung, In-Ha (Dept. of Mechanical Engineering, Graduate School of Yonsei University) ;
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Kim, Dae-Eun
(School of Mechanical Engineering, Yonsei University)
- 발행 : 2002.05.16
초록
The motivation of this work is to use SAM(Self-Assembled Monolayer) for developing a rapid and flexible non-photolithographic nano-structure fabrication technique which can be utilized in micro-machining of metals as well as silicon-based materials. The fabrication technique implemented in this work consists of a two-step process, namely, mechanical scribing followed by chemical etching. From the experimental results, it was found that thiol on copper surface could be removed even under a few nN normal load. The nano-tribological characteristics of thiol-SAM on various metals were largely dependent on the native oxide layer of metals. Based on these findings, nano-patterns with sub-micrometer width and depth on metal surfaces such as Cu, Au and Ag could be obtained using a diamond-coated tip.
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