Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)
- 2002.05a
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- Pages.40-44
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- 2002
Surface Damage Characteristics of Self-Assembled Monolayer and Its Application in Metal Nano-Structure Fabrication
자기 조립 분자막의 표면파손특성 및 미세 금속 구조물 제작에의 응용
- Sung, In-Ha (Dept. of Mechanical Engineering, Graduate School of Yonsei University) ;
- Kim, Dae-Eun (School of Mechanical Engineering, Yonsei University)
- Published : 2002.05.16
Abstract
The motivation of this work is to use SAM(Self-Assembled Monolayer) for developing a rapid and flexible non-photolithographic nano-structure fabrication technique which can be utilized in micro-machining of metals as well as silicon-based materials. The fabrication technique implemented in this work consists of a two-step process, namely, mechanical scribing followed by chemical etching. From the experimental results, it was found that thiol on copper surface could be removed even under a few nN normal load. The nano-tribological characteristics of thiol-SAM on various metals were largely dependent on the native oxide layer of metals. Based on these findings, nano-patterns with sub-micrometer width and depth on metal surfaces such as Cu, Au and Ag could be obtained using a diamond-coated tip.
Keywords
- Atomic Force Microscope;
- Lateral Force Microscope;
- Nano-structure fabrication;
- Th iol-SAM(Self-Assembled Mono layer)